FURTHER APPLICATIONS OF A RECURSIVE MODAL METHOD FOR CALCULATING THE EFFICIENCIES OF X-UV MULTILAYER GRATINGS

Authors
KRASTEV K ANDRE JM BARCHEWITZ R
Citation
K. Krastev et al., FURTHER APPLICATIONS OF A RECURSIVE MODAL METHOD FOR CALCULATING THE EFFICIENCIES OF X-UV MULTILAYER GRATINGS, Journal of the Optical Society of America. A, Optics, image science,and vision., 13(10), 1996, pp. 2027-2033
Citations number
16
Categorie Soggetti
Optics
Journal title
Journal of the Optical Society of America. A, Optics, image science,and vision. → ACNP
ISSN journal
10847529
Volume
13
Issue
10
Year of publication
1996
Pages
2027 - 2033
Database
ISI
SICI code
1084-7529(1996)13:10<2027:FAOARM>2.0.ZU;2-O
Abstract
We apply a recursive propagation method to the modal theory of diffrac tion by laminar amplitude multilayer gratings (LAMG's). We compute the reflection efficiency in the X-UV domain of several LAMG's and show t he numerical stability of this method with respect to a nonrecursive o ne. (C) 1996 Optical Society of America.