We investigated the room temperature electroluminescence of Er doped s
ilicon diodes codoped with O or F as a function of dopant concentratio
n and annealing conditions. Samples with Er concentrations of 5 x 10(1
7) cm(-3) and 10(18) cm(-3) show the most luminescence at lambda = 1.5
4 mu m. In case of F codoping the Er3+ peak intensity at 300 K is weak
and there is a strong defect related peak at about the same wavelengt
h.