HYDROGEN ADSORPTION INDUCED SURFACE RECONSTRUCTIONS ON SI(113) STUDIED BY LEED

Surface reconstructions on Si(113) induced by dissociated hydrogen ads orption have been studied using low energy electron diffraction (LEED) . It has been found that: (1) at 300 K and 80 K temperatures, with the increase of hydrogen coverage on the surface, the (3 x 1) phase trans ferred continuously into a hydrogen saturated (1 x 1)-2H phase; (2) fl ashing of the (1 x 1)-2H surface at about 1100 degrees C resulted in a complete new phase of(1 x 3) and further annealing of the sample at 1 250 degrees C gave back the starting surface of (3 x 1); (3) saturated hydrogen adsorption at a sample temperature of 700 degrees C resulted in a stable new phase of(1 x 2)-H and further saturation doses of hyd rogen at other temperatures below 700 degrees C did not change the (1 x 2) LEED pattern; (4) annealing of the (I x 2)-H surface in the same manner as (2) gave similar results.