FROM MICROSENSORS TO MICROINSTRUMENTS

Authors
PETERSEN K
Citation
K. Petersen, FROM MICROSENSORS TO MICROINSTRUMENTS, Sensors and actuators. A, Physical, 56(1-2), 1996, pp. 143-149
Citations number
24
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
56
Issue
1-2
Year of publication
1996
Pages
143 - 149
Database
ISI
SICI code
0924-4247(1996)56:1-2<143:FMTM>2.0.ZU;2-J
Abstract
In recent years there has been growing commercialization of the simple r silicon micromachined devices, such as pressure sensors and accelera tion sensors. A new field of application of micromachining technology is microinstrumentation, especially regarding chemical and biomedical analysis. The paper reviews a number of the most significant developme nts.