OPTICAL-PROPERTIES OF SI NANOCRYSTALS PREPARED BY MAGNETRON SPUTTERING

Visible photoluminescence (PL), optical transmission, and Raman scatte ring spectra of Si nanocrystals embedded in SiO2 matrix have been stud ied. Films were deposited by rf magnetron sputtering of compound SiO2/ Si targets. Films containing silicon in the form of nanocrystals clust ers show intense luminescence at room temperature. Films containing on ly amorphous Si clusters show little or no FL. Annealing in vacuum or in specific atmosphere leads to strong change of the PL spectrum and i ts intensity. Results are explained by strong influence of the Si/SiO2 interface state on integral PL emission. (C) 1996 American Institute of Physics.