DIAMOND MICROELECTRONIC GAS SENSORS

Diamond-based microelectronic gas sensors using plasma enhanced chemic al vapor deposition (PECVD) technology have been explored in our labor atory. This paper presents a new gas sensor using Pd/i-diamond/p-diamo nd structure for hydrogen detection. Hydrogen sensitivity of the devic e has been characterized and analyzed as a function of hydrogen partia l pressure and temperature by using current-voltage (I-V) and capacita nce-voltage-frequency (C-V-F) methods. The hydrogen sensitivity is hig h, reproducible, and repeatable over a wide temperature range includin g room temperature.