INTEGRATED SENSOR ARRAY FOR GAS-ANALYSIS IN COMBUSTION ATMOSPHERES

A semiconductor-based sensor array has been developed for highly toxic gas analysis in atmospheres with low oxygen content and in the presen ce of humidity and corrosive gases. The device consists of 16 discrete sensing elements formed by tin oxide thin layers deposited by sputter ing. The sensor array was exposed to a gas mixture formed by N-2, O-2, CO2, H2S, HF, HCl and water vapour with a constant flow rate of 500 m l min(-1). Once their electric resistance at different temperatures be tween 150 degrees C and 350 degrees C was stabilized, the response to polluting gases coming from combustion processes (NOx, SO2, C6H6) was studied.