LOW-POWER MICRO GAS SENSOR

Authors
LEE DD CHUNG WY CHOI MS BAEK JM
Citation
Dd. Lee et al., LOW-POWER MICRO GAS SENSOR, Sensors and actuators. B, Chemical, 33(1-3), 1996, pp. 147-150
Citations number
6
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
33
Issue
1-3
Year of publication
1996
Pages
147 - 150
Database
ISI
SICI code
0925-4005(1996)33:1-3<147:LMGS>2.0.ZU;2-P
Abstract
The stable and low-power heating characteristics of a microheater are very important for the micro gas sensor. Membrane-type gas' sensors ha ve been fabricated by silicon IC technology. Steady-state thermal anal ysis by the finite-element method is performed to optimize the thermal properties of the gas sensor. From the analysis, the desirable size o f the microheater for low power consumption is determined. The heating properties of fabricated poly-Si and Pt microheaters have been tested . The sensing characteristics of the packaged microsensor are also exa mined.