INFLUENCE OF THIN-FILM COATINGS ON THE GAS SENSITIVITY PROPERTIES OF NARROW LASER CUT GAP IN IN2O3 ON GLASS SUBSTRATE

New type resistive/capacitive gas sensitive structures were obtained b y using a specially prepared substrate, glass, covered by a thin condu cting In2O3 layer, cut into comb teeth-type electrodes by help of a la ser beam. Such laser processed gap in the layer of conducting material was a prototype of an excellent humidity sensor, especially at high v alues of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuu m thermal evaporation and laser evaporation methods were used to obtai n thin layers of different materials.