TEXTURE OF IBAD TIN FILMS AS A FUNCTION OF ION-BEAM INTENSITY AND ANGULAR INCIDENCE

Because of the directionality of the ion beam, the coating of complex- shaped samples with the IBAD method will result in different growth co nditions of the surface film. A study of variations of the ion-beam in cidence angle and I/A ratio reveals inhomogeneous film microstructures . Interesting effects of ''ion-channelling'' on the crystallographic o rientation of the him crystallites are shown. Complete biaxial orienta tions of the films are achieved with a beam incidence of about 45 degr ees. Orientation changes occur as a function of the ion-beam intensity . Complex interactions of surface and/or strain energy minimization an d the channelling-orientation effect are believed to be responsible fo r these findings.