ROOM-TEMPERATURE DEPOSITION OF TITANIUM CARBIDE BY ION-BEAM-ENHANCED REACTION OF TITANIUM FILMS WITH HYDROCARBONS

In this study, titanium was deposited in an atmosphere of ethane and e thene by electron-beam evaporation onto various substrates at ambient temperature. During condensation, titanium was irradiated with argon i ons of medium energy (12 keV) from an ion source. The composition of t he resulting titanium carbide films was studied using Auger electron s pectroscopy. The phase composition and crystal orientation were determ ined using X-ray diffraction. The results show that, by varying the io n current density, partial pressure and gaseous species, the compositi on of the titanium carbide films can be varied widely.