ELASTOPLASTIC PROPERTIES OF IBAD TIN FILMS MADE UNDER OFF-NORMAL INCIDENCE

For the IBAD coating of practical 3-D samples, effects of off-normal i on incidence on thin film properties have to be studied. Different gro wth conditions lead to different film microstructures. Thin films of T iN, made by reactive IBAD using a 12 kV argon beam, have been grown wi th an ion-to-atom ratio varying from 0 to 0.14 and an ion-beam inciden ce varying from normal to 55 degrees off-normal. The elasto-plastic pr operties of the films were determined by analysing the data from depth -sensing indentation measurements. Three different types of behaviour are observed, corresponding to different kinds of microstructures. Har dness and Young's modulus of the films are dependent on the growth con ditions. The consequence for practical applications of coatings of com plex shape is that only carefully designed object-handling can prevent inhomogeneous film properties.