PVD PROCESSES - PULSED DC FOR SPUTTERING AND BIASING

Authors
MATTOX DM
Citation
Dm. Mattox, PVD PROCESSES - PULSED DC FOR SPUTTERING AND BIASING, Plating and surface finishing, 83(10), 1996, pp. 44-45
Citations number
2
Categorie Soggetti
Metallurgy & Metallurigical Engineering","Materials Science, Coatings & Films
Journal title
Plating and surface finishing → ACNP
ISSN journal
03603164
Volume
83
Issue
10
Year of publication
1996
Pages
44 - 45
Database
ISI
SICI code
0360-3164(1996)83:10<44:PP-PDF>2.0.ZU;2-I