THE FABRICATION OF THIN GAAS CANTILEVER BEAMS FOR POWER SENSOR MICROSYSTEM USING RIE

Authors
HASCIK S LALINSKY T KUZMIK J PORGES M MOZOLOVA Z
Citation
S. Hascik et al., THE FABRICATION OF THIN GAAS CANTILEVER BEAMS FOR POWER SENSOR MICROSYSTEM USING RIE, Vacuum, 47(10), 1996, pp. 1215-1217
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
47
Issue
10
Year of publication
1996
Pages
1215 - 1217
Database
ISI
SICI code
0042-207X(1996)47:10<1215:TFOTGC>2.0.ZU;2-1
Abstract
A method of fabricating two independent thin GaAs cantilever beams usi ng a bulk micromachining technology based on RIE has been developed. T he principle of the method is outlined and results of a three-dimensio nal patterning of the cantilever beams successfully applied in a power sensor microsystem development are described. Copyright (C) 1996 Else vier Science Ltd