Ym. Gueorguiev et al., A PROGRAM FOR MONTE-CARLO SIMULATION OF PENETRATION AND SCATTERING OFACCELERATED ELECTRONS IN MULTICOMPONENT MULTILAYER TARGETS, Vacuum, 47(10), 1996, pp. 1227-1230
A Monte Carlo program for the simulation of penetration and scattering
of accelerated electrons in multicomponent multilayer targets is desc
ribed. The ability of the program to simulate accurately the exposure
distributions as well as the energy and angular distributions of backs
cattered electrons is demonstrated. Copyright (C) 1996 Elsevier Scienc
e Ltd