PVD PROCESSES - MASS-FLOW CONTROL OF GASES

Authors
MATTOX DM
Citation
Dm. Mattox, PVD PROCESSES - MASS-FLOW CONTROL OF GASES, Plating and surface finishing, 84(1), 1997, pp. 64-65
Citations number
NO
Categorie Soggetti
Metallurgy & Metallurigical Engineering","Materials Science, Coatings & Films
Journal title
Plating and surface finishing → ACNP
ISSN journal
03603164
Volume
84
Issue
1
Year of publication
1997
Pages
64 - 65
Database
ISI
SICI code
0360-3164(1997)84:1<64:PP-MCO>2.0.ZU;2-B