SOURCES OF SPUTTERING ION-BEAMS BASED ON COLD-CATHODE DISCHARGE (REVIEW)

Authors
SEMENOV AP
Citation
Ap. Semenov, SOURCES OF SPUTTERING ION-BEAMS BASED ON COLD-CATHODE DISCHARGE (REVIEW), Instruments and experimental techniques, 39(4), 1996, pp. 469-480
Citations number
58
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Instruments and experimental techniques → ACNP
ISSN journal
00204412
Volume
39
Issue
4
Year of publication
1996
Pages
469 - 480
Database
ISI
SICI code
0020-4412(1996)39:4<469:SOSIBO>2.0.ZU;2-2
Abstract
Principles of obtaining sputtering ion beams on the basis of stationar y cold-cathode discharges are described. We consider design features o f ion emitters which generate narrow, wide, ribbon-shaped, and tubular beams, and present their characteristics.