We present a scanning force microscope working in the repulsive force
mode designed for fluid-cell measurements and tip-sample interaction s
tudies. The instrument uses the optical beam deflection principle to m
easure cantilever motion and is compatible with commercially available
microfabricated cantilevers. The instrument is designed to accommodat
e tube scanners with lengths up to 2 in. In order to minimize memory e
ffects in the piezoelectric scanner, we have introduced a technique of
pre- and postscanning to get reproducible force versus distance curve
s. Different linearizing algorithms to decrease the unlinearities of t
he scanner motions are demonstrated. As examples of the performance, w
e present an image of a mica surface obtained in air showing atomic sc
ale stick-slip features, and a force measurement using the fluid cell
with NaCl electrolyte showing the double layer interaction between a g
lass sphere and a mica surface. (C) 1996 American Institute of Physics
.