CHARACTERIZATION OF DCJET CVD DIAMOND FILMS ON MOLYBDENUM

Diamond films grown using a thermal plasma technique are characterized using a variety of techniques. The relationships between the chemistr y, morphology, and mechanical properties are explored using microscopy , Raman spectroscopy, Anger electron spectroscopy, and X-ray photoelec tron spectroscopy. The characteristics of films grown using two differ ent nucleation enhancement techniques are shown. Films grown using hig h methane concentrations at the beginning of growth produce large grai ned columnar films, whereas films grown on substrates which have been treated with a diamond polishing step show nanocrystalline structures. Variations in sp(3) and sp(2) bonding and peak shifts are tracked thr ough the thickness of the film, corresponding to variations in the met hane concentration during growth. Stresses an measured using peak shif ts and beam bending techniques. Adhesion is tested using indentations, and is shown to increase both as growth temperatures and surface roug hness increase.