USE OF CARBONITRIDE FILM AS BUFFER LAYER FOR CVD DIAMOND NUCLEATION

Authors
KARVE P PAL JP PATIL SC KULKARNI AA KANETKAR SM PARIKH N PATNAIK B KSHIRSAGAR ST
Citation
P. Karve et al., USE OF CARBONITRIDE FILM AS BUFFER LAYER FOR CVD DIAMOND NUCLEATION, DIAMOND AND RELATED MATERIALS, 5(12), 1996, pp. 1527-1531
Citations number
19
Categorie Soggetti
Material Science
Journal title
DIAMOND AND RELATED MATERIALS → ACNP
ISSN journal
09259635
Volume
5
Issue
12
Year of publication
1996
Pages
1527 - 1531
Database
ISI
SICI code
0925-9635(1996)5:12<1527:UOCFAB>2.0.ZU;2-G
Abstract
Enhanced nucleation of polycrystalline diamond has been achieved on Si (100) with an intermediate layer of carbonitride. The carbonitride fil m was formed by an ion beam assisted deposition method and was charact erized by Rutherford backscattering, X-ray photoelectron and laser Ram an spectroscopies. The diamond deposition was accomplished using a hot filament chemical vapor deposition technique. Diamond him quality was examined with the help of laser Raman spectroscopy and scanning elect ron microscopy.