SPATIAL-DISTRIBUTION OF STACKING-FAULTS AND MICROTWINS IN ISOLATED CRYSTALS AND TEXTURED DIAMOND FILMS

A relationship between the planar defect distribution observed by TEM and the surface topography observed by SEM is verified for both near [ 100] and near [111] textured diamond films. This relationship leads to precise the description of the microstructure by use of pyramidal cry stalline volumes which are defined by the homothetical growth of the p rincipal facets constituting the film surface during the synthesis. De pending on the facet type, {111} or {100}, these volumes are respectiv ely filled or free of planar defects. The observations made on texture d films also allowed estimation of the crystalline quality of isolated crystals according to their morphology.