A NOVEL METHOD TO PREDICT LASER-INDUCED, NONLINEAR THERMAL EFFECTS INSEMICONDUCTORS

We have developed novel analytical methods to predict laser-induced, n on-linear thermal effects in semiconductors. Equations based on energy balance considerations were used for the estimation of melt depths, s urface temperatures and maximum solidification velocities of semicondu ctors exposed to nanosecond laser pulses. The effect of laser pulse du ration and fluence on these parameters was displayed graphically. Anal ytical results were compared with detailed numerical solutions and exp erimental values where available. Good agreement between analytical an d numerical calculations was observed, thus suggesting the universal a pplication of this method to the estimation of non-linear thermal effe cts of laser-irradiated materials.