LINEAR PLANARIZATION FOR CMP

Authors
JAIRATH R PANT A MALLON T WITHERS B KRUSELL W
Citation
R. Jairath et al., LINEAR PLANARIZATION FOR CMP, Solid state technology, 39(10), 1996, pp. 107
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
39
Issue
10
Year of publication
1996
Database
ISI
SICI code
0038-111X(1996)39:10<107:LPFC>2.0.ZU;2-7