GLASS WAVE-GUIDES PRODUCED BY ION-EXCHANGE - A CHARACTERIZATION BY RBS

Authors
GIESSLER KH RAUCH F FABRICIUS N
Citation
Kh. Giessler et al., GLASS WAVE-GUIDES PRODUCED BY ION-EXCHANGE - A CHARACTERIZATION BY RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 117(4), 1996, pp. 447-451
Citations number
7
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
117
Issue
4
Year of publication
1996
Pages
447 - 451
Database
ISI
SICI code
0168-583X(1996)117:4<447:GWPBI->2.0.ZU;2-B
Abstract
Glass waveguides produced by ion-exchange are used for passive integra ted optics applications. In order to predict the properties of these w aveguides it is necessary to know the refractive index profile. Optica l measurements are of limited usefulness for this purpose. However, th e waveguides can also be characterized through the concentration profi les of the exchanged ions. With Rutherford Backscattering Spectrometry (RBS) it is possible to determine depth profiles of the exchanged ion s in the glass substrate. Results for monomode, multimode and buried w aveguides are reported and in the case of multimode waveguides they ar e compared with those obtained by optical mode analysis.