SILICA ON SI WAVE-GUIDES FOR SELF-ALIGNED FIBER ARRAY COUPLING USING FLIP-CHIP SI V-GROOVE TECHNIQUE

Silica on silicon singlemode waveguide devices have been realised by a new process that allows for high precision alignment features For sel f-aligned waveguide to fibre array coupling, using an Si V-groove flip -chip opto-hybridisation technique. Submicrometre alignment precision in coupling the waveguide to cleaved or lensed fibre arrays results in low excess mounting losses of 0.2 and 0.5 dB. respectively.