The effect of the built-in biaxial stress on the E(2) and A(1) (LO) q
= 0 phonon modes of wurtzite GaN layers deposited by Metal Organic Vap
or Phase Epitaxy on (0001) direction on sapphire substrates is studied
by Raman spectroscopy. Shifts in phonon frequencies are measured, whi
ch we correlate to the residual strain fields in the epilayers. Using
stress calibration measurements taken from reflectance data, the biaxi
al pressure coefficients of mode frequencies are determined and used t
o calculate the corresponding deformation potentials. Copyright (C) 19
96 Elsevier Science Ltd