EFFECTS OF OXIDE ADDITIVES ON SHEET RESISTANCE OF W THICK-FILM CONDUCTOR

Authors
LIANG TX SUN WZ WANG YH LI HD WU QL YAN YJ
Citation
Tx. Liang et al., EFFECTS OF OXIDE ADDITIVES ON SHEET RESISTANCE OF W THICK-FILM CONDUCTOR, Journal of Materials Science, 31(19), 1996, pp. 5159-5161
Citations number
4
Categorie Soggetti
Material Science
Journal title
Journal of Materials Science → ACNP
ISSN journal
00222461
Volume
31
Issue
19
Year of publication
1996
Pages
5159 - 5161
Database
ISI
SICI code
0022-2461(1996)31:19<5159:EOOAOS>2.0.ZU;2-F
Abstract
A multilayer AIN-W cofired body has been developed using the pressless sintering technique. Effects of additives, such as Y2O3, CaO, La2O3, MgO, Al2O3 and SiO2, on the sheet resistance of W conductor were studi ed. The sheet resistance of the W conductor increases with increasing additives in the W paste. However, the oxides can be divided into two groups. The effect of the first group on sheet resistance is different from that of the second group.