We fabricated c-axis oriented mesas oil YBa2Cu3O7-delta thin films. Co
lumnar structures with an area of 20 x 20 mu m(2) and a depth of 0.1 m
u m were formed on oxygen deficient films with a critical temperature
(T-c) of 64 K or less. The devices showed hysteretic I-V curves withou
t any branches. The dependence of the critical current density on the
temperature near T, is explained by the Ambegaokar-Baratoff relation.