The thermal treatment of Nb/Si/Nb Josephson junction with high resisti
ve amorphous silicon barrier (2nm thick) involves the interdiffusion a
t Nb/Si interfaces even at 250 degrees C. In order to study these tiny
interdiffusion process a superlattice [Nb(6nm)/Si(2nm)]10 (prepared
at the same technological conditions as the Josephson junction) nas us
ed for low angle x-ray spectroscopy. The interdiffusion yielding a sub
layer of superconducting Nb-Si amorphous mixture at the interfaces was
detected. This represents in the Josephson junction the decrease of S
i-barrier thickness and consequently the increase of critical current
in measured I-V characteristic.