OPTICAL-EMISSION SPECTROSCOPY AND GROWTH OF NBN FILMS BY PULSED-LASERDEPOSITION

We study the fluorescence spectra corresponding to deposition paramete rs suitable to grow superconducting NbN films of the cubic phase by us ing a pulsed laser deposition technique in a N-2 atmosphere. A Nd-YAG laser beam having lambda=532 nm focused on either a pure Nb or a NbN t argets generated the plasma. Photoemission spectra in the wavelength r egion [600-630] nm of excited ions within the plume region have been a nalyzed either for a Nb or a NbN target in the presence of He, Ar, and N-2 gas at different pressure values. The possibility of a reactive p rocess between N-2 and Nb occurring in the plume region is discussed.