ANGLE-RESOLVED POLARIMETRIC PHASE MEASUREMENT FOR THE CHARACTERIZATION OF GRATINGS

Authors
GIOVANNINI H DEUMIE C AKHOUAYRI H AMRA C
Citation
H. Giovannini et al., ANGLE-RESOLVED POLARIMETRIC PHASE MEASUREMENT FOR THE CHARACTERIZATION OF GRATINGS, Optics letters, 21(20), 1996, pp. 1619-1621
Citations number
13
Categorie Soggetti
Optics
Journal title
Optics letters → ACNP
ISSN journal
01469592
Volume
21
Issue
20
Year of publication
1996
Pages
1619 - 1621
Database
ISI
SICI code
0146-9592(1996)21:20<1619:APPMFT>2.0.ZU;2-L
Abstract
A goniometric ellipsometer is used to recover the optogeometrical para meters of metallic gratings. The phase difference between TE and TM po larizations in all the diffracted orders is measured as a function of the incidence angle. The groove depth, together with the refractive in dices of all the media of the diffracting structure, is determined for a holographic sinusoidal aluminum grating. It is shown that a thin la yer of alumina on top of the grating must be considered. (C) 1996 Opti cal Society of America