ADVANCED MATERIALS ANALYSIS TECHNIQUES FOR NANOELECTRONICS

Authors
KUBODERA K MARUO T KUROSAWA S IKEDA K
Citation
K. Kubodera et al., ADVANCED MATERIALS ANALYSIS TECHNIQUES FOR NANOELECTRONICS, NTT review, 8(5), 1996, pp. 44-47
Citations number
2
Categorie Soggetti
Engineering, Eletrical & Electronic",Telecommunications
Journal title
NTT review → ACNP
ISSN journal
09152334
Volume
8
Issue
5
Year of publication
1996
Pages
44 - 47
Database
ISI
SICI code
0915-2334(1996)8:5<44:AMATFN>2.0.ZU;2-#
Abstract
This paper reviews several techniques for analyzing nanoelectronic mat erials, such as atomic structural analyses, chemical distribution anal yses, and trace analyses, and their recent technological innovation de veloped in NTT Laboratories.