OPTICAL INTERFEROMETRIC DETERMINATION OF INPLANE RESIDUAL-STRESSES INSIO2-FILMS ON SILICON SUBSTRATES

Authors
GHAFFARI K WANG B DANYLUK S BILLONE M PHARR G
Citation
K. Ghaffari et al., OPTICAL INTERFEROMETRIC DETERMINATION OF INPLANE RESIDUAL-STRESSES INSIO2-FILMS ON SILICON SUBSTRATES, Materials evaluation, 54(10), 1996, pp. 1167-1170
Citations number
16
Categorie Soggetti
Materials Science, Characterization & Testing
Journal title
Materials evaluation → ACNP
ISSN journal
00255327
Volume
54
Issue
10
Year of publication
1996
Pages
1167 - 1170
Database
ISI
SICI code
0025-5327(1996)54:10<1167:OIDOIR>2.0.ZU;2-J