AFM STUDIES OF THE INITIAL-STAGES OF SPIN-COATED PREPOLYMER FILM GROWTH ON SILICON-WAFERS

Authors
GESANG T HOPER R POSSART W PETERMANN J HENNEMANN OD
Citation
T. Gesang et al., AFM STUDIES OF THE INITIAL-STAGES OF SPIN-COATED PREPOLYMER FILM GROWTH ON SILICON-WAFERS, Advanced materials, 8(10), 1996, pp. 829
Citations number
16
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
8
Issue
10
Year of publication
1996
Database
ISI
SICI code
0935-9648(1996)8:10<829:ASOTIO>2.0.ZU;2-9
Abstract
Polymeric film growth on inorganic substrates plays an important role in the technology of sensors and microelectronics. A study of the film growth of a pre polymer of the dicyanate of bisphenol A (DCBA) spin-c oated onto silicon substrates is presented in which layer-by-layer gro wth is demonstrated. This mode of growth is thought to be related to a n enrichment of the trimer (see Figure) including a triazine ring.