THE EFFECT OF CURRENT-DENSITY AND STRIPE LENGTH ON RESISTANCE SATURATION DURING ELECTROMIGRATION TESTING

Authors
FILIPPI RG WACHNIK RA AOCHI H LLOYD JR KORHONEN MA
Citation
Rg. Filippi et al., THE EFFECT OF CURRENT-DENSITY AND STRIPE LENGTH ON RESISTANCE SATURATION DURING ELECTROMIGRATION TESTING, Applied physics letters, 69(16), 1996, pp. 2350-2352
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
69
Issue
16
Year of publication
1996
Pages
2350 - 2352
Database
ISI
SICI code
0003-6951(1996)69:16<2350:TEOCAS>2.0.ZU;2-V
Abstract
Resistance saturation as a function of current density and stripe leng th has been investigated for a two-level structure with Ti/TiN/AlCu/Ti /TiN stripes and interlevel W stud vias, A simple model relating the r esistance change at saturation to the current density and stripe lengt h is formulated for structures with short stripe lengths and blocking boundaries at both ends. Experimental results for stripe lengths of 25 , 50, or 100 mu m are in good agreement with the model predictions. (C ) 1996 American Institute of Physics.