GROUP WORK OF DISTRIBUTED MICROACTUATORS

This paper proposes and demonstrates a method to obtain macroscopic wo rk out of distributed microactuators fabricated by IC-compatible micro machining processes. We have coordinated the simple and small motion o f microactuators in order to perform a task. The concept and a control scheme are discussed first. In order to show the feasibility, the fab rication and operation of arrayed microactuators for conveyors are des cribed. One uses thermally driven cantilevers and the other uses contr olled air flow from micronozzles to carry flat objects.