The flexible microactuator (FMA) is a novel pneumatic rubber actuator
developed for use in microrobots. This paper reports on integrated FMA
systems to achieve distributed motion as occurs in intestinal villi,
and with multi-legged arthropods such as centipedes. For the purpose o
f miniaturization and integration of FMAs, the authors focussed on two
technical issues: A new fabrication process based on stereo lithograp
hy and a new FMA design called a restraint beam FMA. Stereo lithograph
y enables fabrication of micro-structures with rubber-like materials s
uitable for integrated FMAs. The restraint beam FMA makes it possible
to fabricate FMAs from a single material, allowing stereo lithography
to be used. As examples of integrated FMA systems, four prototypes are
shown: a 5x5 FMA array, a 3x3 FMA array which has pneumatic circuits
at its base, a pipe interior mobile robot, and an amusement system con
sisting of 30 FMAs, which demonstrates ball handling ability.