INTEGRATED FLEXIBLE MICROACTUATOR SYSTEMS

The flexible microactuator (FMA) is a novel pneumatic rubber actuator developed for use in microrobots. This paper reports on integrated FMA systems to achieve distributed motion as occurs in intestinal villi, and with multi-legged arthropods such as centipedes. For the purpose o f miniaturization and integration of FMAs, the authors focussed on two technical issues: A new fabrication process based on stereo lithograp hy and a new FMA design called a restraint beam FMA. Stereo lithograph y enables fabrication of micro-structures with rubber-like materials s uitable for integrated FMAs. The restraint beam FMA makes it possible to fabricate FMAs from a single material, allowing stereo lithography to be used. As examples of integrated FMA systems, four prototypes are shown: a 5x5 FMA array, a 3x3 FMA array which has pneumatic circuits at its base, a pipe interior mobile robot, and an amusement system con sisting of 30 FMAs, which demonstrates ball handling ability.