We have developed a meander coil type linear sensor. When a detection
coil is moved on a scale coil, mutual inductance fluctuates according
to the displacement, causing the impedance change of detection coil. T
herefore, displacement can be detected by using this impedance change.
Impedance becomes like a sine wave form and impedance variation incre
ases by resonating the coil, compared with the case when the coil is n
ot resonating. When the width of the detection coil and scale coil are
0.5 and 0.6 mm respectively, impedance variation has its maximum of 3
8.6 Ohm.