The manner in which magnetization reversal process of coupled NiFeCo f
ilms are affected by various surface topography conditions of integrat
ed circuit (IC) underlayers was examined. The experimental results dem
onstrated that the topography of underlayers play a significant role i
n affecting the magnetization reversal characteristics of the coupled
films. A hysteresis loop with lower coercivity and homogeneous switchi
ng field distribution can be obtained for the coupled films deposited
on underlayer with a smooth surface topography. When the coupled films
were deposited on underlayers having severe surface topography, a hys
teresis loop with higher coercivity and inhomogeneous switching field
distribution was obtained. Such behavior may be attributed to induced
inhomogeneous coupling in the coupled films due to the severe topograp
hy.