PIEZOMAGNETIC TUNING OF A MICROMACHINED RESONATOR

We have been developing a range of high performance thin film and mult ilayer piezomagnetic materials for possible integration in to microele ctromechanical systems. In this paper we demonstrate that the resonant frequency of a micromachined resonant beam may be tuned using the Del ta E effect associated with such piezomagnetic materials. This demonst ration of principle leads directly to methods of addressing inherent p roblems such as thermal drift or ageing in microsystems. We also prese nt a discussion of the benefits to be derived from the use of piezomag netic materials in such applications.