NEW AUTOMOTIVE AIR FUEL SENSOR-BASED ON TIO2-DOPED NB2O5 THIN-FILM BYION-BEAM-ENHANCED DEPOSITION/

This paper describes the preparation of a TiO2-doped Nb2O5 thin film u sing the ion-beam-enhanced deposition technique and the development of a new automobile air/fuel sensor with an additionally integrated plat inum temperature sensor and a Pt heater. The resistive jump at the sto ichiometric point in the characteristic curve is three orders of magni tude. The response time of the sensor is almost identical with that of the ZrO2 oxygen sensor. The performance of the sensor becomes stable after seven measurement periods. Preliminary results indicate that thi s sensor exhibits attractive performance and the potential to monitor the h-value for automobile exhaust gas.