KINETIC-MODEL OF AN RF DISCHARGE IN OXYGEN

A kinetic model to assist in understanding the complicated physical an d chemical processes occurring in an RF oxygen plasma has been develop ed. Ten fundamental reaction equations are considered to account for t he production and loss processes of the main reactive species. The rat e coefficients for the electron impact processes used in the balance e quations are calculated using the measured electron energy distributio n function. The calculated concentrations of O and O-2 are compared w ith experimentally measured values for a range of pressure and RF powe r. The reasonable agreement between results of the model calculation a nd the experimental data confirms the validity of the model used.