Ja. Rebane et al., QUANTITATIVE-ANALYSIS OF THIN-FILMS OF RBA(2)CU(3)O(7-X) (R-EQUALS-RARE-EARTH-ELEMENTS) AND ZRO2 (Y2O3) BUFFER LAYERS BY SNMS, Fresenius' journal of analytical chemistry, 356(8), 1996, pp. 484-487
It is shown that RBa(2)Cu(3)O(7-x) single crystals may be used as refe
rence samples for the quantitative analysis of RBa(2)Cu(3)O(7-x) thin
films by SNMS. RSF-values for Y and Cu (relative to Ba) determined for
ceramic RBa(2)Cu(3)O(7-x) samples are higher than those for single cr
ystals. This difference may be caused by Ba segregation on grain bound
aries. The depth profile analysis of YSZ/Al2O3 samples was performed b
y DBM using a Ni grid to prevent sample charging. The reproducibility
of analysis tvas better than 10%.