In this paper, we briefly review a model that describes the diffusion-
controlled aggregation exhibited by particles as they are deposited on
a surface. This model allows us to understand many experiments of thi
n film deposition. In the Sec. 1, we describe the model, which incorpo
rates deposition, particle and cluster diffusion, and aggregation. In
Sec. 2, we study the dynamical evolution of the model. Finally, we ana
lyze the effects of small cluster mobility and show that the introduct
ion of cluster diffusion dramatically affects the dynamics of film gro
wth. Some of these effects can be tested experimentally.