PREPARATION AND PYROELECTRIC PROPERTIES OF (PB, LA)(ZR, TI)O-3 (PLZT)THIN-FILMS

PLZT films around 3 mu m thick with compositions of ((Pb0.925La0.075)( ZryTi1-y)(0.981) + 0.5 mass%MnO2) where y = 0-0.10, which have an appr opriately small relative dielectric constant (similar to 200) were dep osited on Pt(100)/MgO(100) by rf magnetron sputtering. The pyroelectri c properties of PLZT films as element materials for pyroelectric IR se nsors were investigated in detail. Assuming that the volume specific h eat C-v of the present films is 3.2 J/cm(3) . K the PLZT films exhibit ed the highest F.M. of 1.4 x 10(-10) C . cm/J and F.M.D of 1.0 x 10(- 8) C . cm/J, which were around 1.8 times and 1.5 times larger than tho se of PLT films, respectively Consequently, the figures of merit for t he pyroelectric IR sensors could be improved by adding a small amount of Zr to PLT.