STATIC CHARACTERISTICS OF PIEZOELECTRIC THIN-FILM BUCKLING ACTUATOR

We have developed a diaphragm piezoelectric microactuator, The diaphra gm consists of a Pb(Zr, Ti)O-3 (PZT) thin him, electrode layers, an is olation layer and a Si substrate, The diaphragm is deflected by transv erse stress in the PZT thin Blm which is fabricated by a sputtering an d annealing process, The PZT thin film has a piezoelectric coefficient d(31)-100 pC/N, which is comparable to that of bulk PZT. A diaphragm deflection of 3 mu m was obtained at an electric field of 16 V/mu m.