LOW-VOLTAGE SWITCHING CHARACTERISTICS OF SRBI2TA2O9 CAPACITORS

Ferroelectric capacitor arrays were fabricated using SrBi2Ta2O9 (SET) thin films: Hysteresis and pulse responses were measured as functions of capacitor size and applied voltage. The remanent polarization (P-r) at 5 V does not depend on capacitor size, though P-r at low applied v oltage decreases considerably as capacitor size decreases below 10 mu m. High-voltage pulse application enhances low-voltage polarization sw itching. Retention characteristics strongly depend on operating voltag e. Switching charge at 2 V or above is stable up to 10(4) s retention, while that at 1 V operation decreases with increasing retention time.