A NEW METHOD FOR LOW-MAGNIFICATION IN THE ENVIRONMENTAL SCANNING ELECTRON-MICROSCOPE

Citation
Me. Taylor et Sa. Wight, A NEW METHOD FOR LOW-MAGNIFICATION IN THE ENVIRONMENTAL SCANNING ELECTRON-MICROSCOPE, Scanning, 18(7), 1996, pp. 483-489
Citations number
11
Categorie Soggetti
Microscopy
Journal title
ISSN journal
01610457
Volume
18
Issue
7
Year of publication
1996
Pages
483 - 489
Database
ISI
SICI code
0161-0457(1996)18:7<483:ANMFLI>2.0.ZU;2-Z
Abstract
A device has been developed and used successfully on two models of the environmental scanning electron microscope that allows low-magnificat ion imaging of about 30x, significantly better than the original 200x low-magnification imaging limit. This was achieved by using an additio nal aperture to limit the pressure at a point where it will not block the electron beam, and a larger aperture plate for the combination fin al aperture/secondary electron signal collection surface that also doe s not block the electron beam significantly.