NUMERICAL MODELING OF MICROMECHANICAL DEVICES USING THE DIRECT SIMULATION MONTE-CARLO METHOD

A direct simulation Monte Carlo (DSMC) investigation of flows related to microelectromechanical systems (MEMS) is detailed This effort is in tended to provide tools to facilitate the design and optimization of m icro-devices as well as to probe the effects of rarefaction, especiall y in regimes not amenable to other means of analysis. The code written for this purpose employs an unstructured grid, a trajectory-tracing p article movement scheme, and an ''infinite channel'' boundary formulat ion. Its results for slip-flow and transition regime micro-channels an d a micro-nozzle are presented to demonstrate its capabilities.