Es. Piekos et Ks. Breuer, NUMERICAL MODELING OF MICROMECHANICAL DEVICES USING THE DIRECT SIMULATION MONTE-CARLO METHOD, Journal of fluids engineering, 118(3), 1996, pp. 464-469
A direct simulation Monte Carlo (DSMC) investigation of flows related
to microelectromechanical systems (MEMS) is detailed This effort is in
tended to provide tools to facilitate the design and optimization of m
icro-devices as well as to probe the effects of rarefaction, especiall
y in regimes not amenable to other means of analysis. The code written
for this purpose employs an unstructured grid, a trajectory-tracing p
article movement scheme, and an ''infinite channel'' boundary formulat
ion. Its results for slip-flow and transition regime micro-channels an
d a micro-nozzle are presented to demonstrate its capabilities.