Te. Sheridan, A MODEL OF PLASMA SOURCE ION-IMPLANTATION FOR INNER SURFACE MODIFICATION, Journal of physics. D, Applied physics, 29(10), 1996, pp. 2733-2734
The conclusions of Sun et al concerning the expansion of the plasma sh
eath in a cylindrical bore are shown to be incorrect and unphysical. I
n particular, the sheath accelerates as it nears the centre of the bor
e rather than slowing and, under the same conditions, the sheath expan
ds more rapidly for inner surface implantation than it does for outer
surface implantation.